Two slit edges are driven by only one piezoelectric actuator. Solid state flexure hinges with a parallelogram design were used to construct the piezo slit systems in order to ensure the synchronization of the slit edges with respect to the center line. To avoid hysteresis, creep, and temperature effects, the piezoelectric slit can be equipped with a strain gauge measurement system. The positioning accuracy of the piezo slit with an integrated measurement system is typically 0.1% or better. Piezo slit elements are also available with steel slit edges. Almost all piezo slit systems PZS are available in UHV compatible versions and with different body and slit edge materials (INVAR).
Exhibitor: piezosystem jena GmbH